Electrical impedance spectroscopy of silicon

Petr Viscor; J. Vedde

Electrical impedance spectroscopy of silicon

Petr Viscor, J. Vedde

Research output: Chapter in Book/Report/Conference proceeding › Book chapter › Research

Original language	English
Title of host publication	Proceedings of the electrochemical society : symposium on diagnostic techniques for semiconductor materials and devices
Editors	P. Rai-Choudhury
Publisher	SPIE - International Society for Optical Engineering
Publication date	1997
Pages	362-376
Publication status	Published - 1997

Series	Proceedings of SPIE, the International Society for Optical Engineering
Number	12
Volume	1997
ISSN	0277-786X

Cite this

Viscor, Petr ; Vedde, J. / Electrical impedance spectroscopy of silicon. Proceedings of the electrochemical society: symposium on diagnostic techniques for semiconductor materials and devices. editor / P. Rai-Choudhury. SPIE - International Society for Optical Engineering, 1997. pp. 362-376 (Proceedings of SPIE, the International Society for Optical Engineering; No. 12, Vol. 1997).

@inbook{3812d0f052bf11dba4bc000ea68e967b,

title = "Electrical impedance spectroscopy of silicon",

author = "Petr Viscor and J. Vedde",

year = "1997",

language = "English",

series = "Proceedings of SPIE, the International Society for Optical Engineering",

publisher = "SPIE - International Society for Optical Engineering",

number = "12",

pages = "362--376",

editor = "P. Rai-Choudhury",

booktitle = "Proceedings of the electrochemical society",

}

Viscor, P & Vedde, J 1997, Electrical impedance spectroscopy of silicon. in P Rai-Choudhury (ed.), Proceedings of the electrochemical society: symposium on diagnostic techniques for semiconductor materials and devices. SPIE - International Society for Optical Engineering, Proceedings of SPIE, the International Society for Optical Engineering, no. 12, vol. 1997, pp. 362-376.

Electrical impedance spectroscopy of silicon. / Viscor, Petr; Vedde, J.
Proceedings of the electrochemical society: symposium on diagnostic techniques for semiconductor materials and devices. ed. / P. Rai-Choudhury. SPIE - International Society for Optical Engineering, 1997. p. 362-376 (Proceedings of SPIE, the International Society for Optical Engineering; No. 12, Vol. 1997).

Research output: Chapter in Book/Report/Conference proceeding › Book chapter › Research

Viscor P, Vedde J. Electrical impedance spectroscopy of silicon. In Rai-Choudhury P, editor, Proceedings of the electrochemical society: symposium on diagnostic techniques for semiconductor materials and devices. SPIE - International Society for Optical Engineering. 1997. p. 362-376. (Proceedings of SPIE, the International Society for Optical Engineering; No. 12, Vol. 1997).