Electrical impedance spectroscopy of silicon

Petr Viscor; J. Vedde

Electrical impedance spectroscopy of silicon

Petr Viscor, J. Vedde

Publikation: Bidrag til bog/antologi/rapport › Bidrag til bog/antologi › Forskning

Originalsprog	Engelsk
Titel	Proceedings of the electrochemical society : symposium on diagnostic techniques for semiconductor materials and devices
Redaktører	P. Rai-Choudhury
Forlag	SPIE - International Society for Optical Engineering
Publikationsdato	1997
Sider	362-376
Status	Udgivet - 1997

Navn	Proceedings of SPIE, the International Society for Optical Engineering
Nummer	12
Vol/bind	1997
ISSN	0277-786X

Citer dette

Viscor, Petr ; Vedde, J. / Electrical impedance spectroscopy of silicon. Proceedings of the electrochemical society: symposium on diagnostic techniques for semiconductor materials and devices. red. / P. Rai-Choudhury. SPIE - International Society for Optical Engineering, 1997. s. 362-376 (Proceedings of SPIE, the International Society for Optical Engineering; Nr. 12, Bind 1997).

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title = "Electrical impedance spectroscopy of silicon",

author = "Petr Viscor and J. Vedde",

year = "1997",

language = "English",

series = "Proceedings of SPIE, the International Society for Optical Engineering",

publisher = "SPIE - International Society for Optical Engineering",

number = "12",

pages = "362--376",

editor = "P. Rai-Choudhury",

booktitle = "Proceedings of the electrochemical society",

}

Viscor, P & Vedde, J 1997, Electrical impedance spectroscopy of silicon. i P Rai-Choudhury (red.), Proceedings of the electrochemical society: symposium on diagnostic techniques for semiconductor materials and devices. SPIE - International Society for Optical Engineering, Proceedings of SPIE, the International Society for Optical Engineering, nr. 12, bind 1997, s. 362-376.

Electrical impedance spectroscopy of silicon. / Viscor, Petr; Vedde, J.
Proceedings of the electrochemical society: symposium on diagnostic techniques for semiconductor materials and devices. red. / P. Rai-Choudhury. SPIE - International Society for Optical Engineering, 1997. s. 362-376 (Proceedings of SPIE, the International Society for Optical Engineering; Nr. 12, Bind 1997).

Publikation: Bidrag til bog/antologi/rapport › Bidrag til bog/antologi › Forskning

Viscor P, Vedde J. Electrical impedance spectroscopy of silicon. I Rai-Choudhury P, red., Proceedings of the electrochemical society: symposium on diagnostic techniques for semiconductor materials and devices. SPIE - International Society for Optical Engineering. 1997. s. 362-376. (Proceedings of SPIE, the International Society for Optical Engineering; Nr. 12, Bind 1997).