Electrical characterization of bonded unipolar silicon junctions

Petr Viscor, J. Vedde, K. Rasmussen, C. Caraglia, M. Benamara

    Publikation: Bidrag til bog/antologi/rapportBidrag til bog/antologiForskning

    OriginalsprogEngelsk
    TitelSemiconductor wafterbonding : physica and applications 4
    ForlagThe Electrochemical Society
    Publikationsdato1997
    Sider9 s.
    StatusUdgivet - 1997

    Citer dette

    Viscor, P., Vedde, J., Rasmussen, K., Caraglia, C., & Benamara, M. (1997). Electrical characterization of bonded unipolar silicon junctions. I Semiconductor wafterbonding: physica and applications 4 (s. 9 s.). The Electrochemical Society.